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::: Integrated circuits fabrication technologies 3 credit 3 hours
In this lecture, the following topics will be introduced: 1.Operating modes & theory of MOS devices; 2.Small-geometry effects on MOS devices; 3.Silicon wafer growth; 4.CMOS IC fabrication processes; 5.Photomasks & photolithography; 6.Oxidations; 7.Diffusion & ion implantation; 8.CVD techniques; 9.Evaporation & sputtering.
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